Enquiry   1533880602_Catalog_Mikasa.pdf

1. Suitable for 6-inch-dia. wafers and 100 × 100 mm substrates.

2. Delivery record 7500 or more.

3. Sample stages are possible to make your requirements.

4. We have verification data on various coating materials to support your research.

Product Specifications

Maximum substrate size 6-inch-dia. wafers or 100 × 100 mm substrates
Rotational speed (rpm) 20 to 7,000
Rotational accuracy ±1 rpm (under load)
Motor AC servomotor
Cover Acrylic
Inside diameter of spinning chamber 290 mm dia.
Numbers of steps and patterns 100 steps × 10 patterns
Time setting 999.9 sec
Safety interlock Vacuum (included as standard)
Cover (optional)
Dripping equipment Optional
Working vacuum pressure -0.08 to -0.1 MPa
Power supply 100 to 240 V AC, 5 A
Outside dimensions (mm) 352 W × 303 H × 432 D
Weight 16 kg


Note: Specifications are subject to change without notice.

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