1. Suitable for 6-inch-dia. wafers and 100 × 100 mm substrates.
2. Delivery record 7500 or more.
3. Sample stages are possible to make your requirements.
4. We have verification data on various coating materials to support your research.
Product Specifications
|
Maximum substrate size |
6-inch-dia. wafers or 100 × 100 mm substrates |
|
Rotational speed (rpm) |
20 to 7,000 |
|
Rotational accuracy |
±1 rpm (under load) |
|
Motor |
AC servomotor |
|
Cover |
Acrylic |
|
Inside diameter of spinning chamber |
290 mm dia. |
|
Numbers of steps and patterns |
100 steps × 10 patterns |
|
Time setting |
999.9 sec |
|
Safety interlock |
Vacuum (included as standard)
Cover (optional) |
|
Dripping equipment |
Optional |
|
Working vacuum pressure |
-0.08 to -0.1 MPa |
|
Power supply |
100 to 240 V AC, 5 A |
|
Outside dimensions (mm) |
352 W × 303 H × 432 D |
|
Weight |
16 kg |
Note: Specifications are subject to change without notice.