1. Suitable for 4-inch-dia. wafers and 75 × 75 mm substrates.
2. Delivery record 7500 or more.
3. Sample stages are possible to make your requirements.
4. We have verification data on various coating materials to support your research.
Product Specifications
|
Maximum substrate size |
4-inch-dia. wafers or 75 × 75 mm substrates |
|
Rotational speed (rpm) |
20 to 8,000 |
|
Rotational accuracy |
±1 rpm (under load) |
|
Motor |
AC servomotor |
|
Cover |
Acrylic |
|
Inside diameter of spinning chamber |
220 mm dia. |
|
Numbers of steps and patterns |
100 steps × 10 patterns |
|
Time setting |
999.9 sec |
|
Safety interlock |
Vacuum (included as standard)
Cover (optional) |
|
Dripping equipment |
Cannot be attached. |
|
Working vacuum pressure |
-0.08 to -0.1 MPa |
|
Power supply |
100 to 240 V AC, 5 A |
|
Outside dimensions (mm) |
259 W × 246 H × 330 D |
|
Weight |
10 kg |
Note: Specifications are subject to change without notice.