Enquiry   1533879612_Catalog_Mikasa.pdf

1. Suitable for 4-inch-dia. wafers and 75 × 75 mm substrates.

2. Delivery record 7500 or more.

3. Sample stages are possible to make your requirements.

4. We have verification data on various coating materials to support your research.

Product Specifications

Maximum substrate size 4-inch-dia. wafers or 75 × 75 mm substrates
Rotational speed (rpm) 20 to 8,000
Rotational accuracy ±1 rpm (under load)
Motor AC servomotor
Cover Acrylic
Inside diameter of spinning chamber 220 mm dia.
Numbers of steps and patterns 100 steps × 10 patterns
Time setting 999.9 sec
Safety interlock Vacuum (included as standard)
Cover (optional)
Dripping equipment Cannot be attached.
Working vacuum pressure -0.08 to -0.1 MPa
Power supply 100 to 240 V AC, 5 A
Outside dimensions (mm) 259 W × 246 H × 330 D
Weight 10 kg


Note: Specifications are subject to change without notice.


back to listing