● Magnet gear adoption
By adopting the magnet gear in the device drive part, we are minimizing micro dust generation from the gear part which we could not realize until now. We have made it possible to correspond to high-density substrates.
● Maintenance
The distribution board and the air relation are gathered under the cradle, enabling intensive maintenance on the operation side.
● Concentrated touch panel
By providing a touch panel, we made it possible to unify the operation.